Title:
位置計測方法、並びに露光方法及び装置
Document Type and Number:
Japanese Patent JP5517071
Kind Code:
B2
Inventors:
Masaki Kato
Tomoyuki Okawa
Mizuhashi Kensuke
Tomoyuki Okawa
Mizuhashi Kensuke
Application Number:
JP2010519740A
Publication Date:
June 11, 2014
Filing Date:
June 29, 2009
Export Citation:
Assignee:
NIKON CORPORATION
International Classes:
H01L21/027; G01B9/02; G01B11/00; G01B11/30; G03F7/20; H01L21/68
Domestic Patent References:
JPH11274049A | 1999-10-08 | |||
JP2002365016A | 2002-12-18 | |||
JP2007113938A | 2007-05-10 | |||
JP2002328007A | 2002-11-15 |
Attorney, Agent or Firm:
Satoshi Omori