Title:
絶縁性遮光膜形成用感放射線性組成物、絶縁性遮光膜の形成方法、絶縁性遮光膜及び固体撮像素子
Document Type and Number:
Japanese Patent JP5521671
Kind Code:
B2
Inventors:
Ayako Shimada
Application Number:
JP2010061525A
Publication Date:
June 18, 2014
Filing Date:
March 17, 2010
Export Citation:
Assignee:
JSR CORPORATION
International Classes:
H01L27/14
Domestic Patent References:
| JP2010045192A | ||||
| JP2006284947A |
Attorney, Agent or Firm:
Kiyoshi Kojima
Yoshinobu Hagino
Yoshinobu Hagino