Title:
金属‐炭素複合材料
Document Type and Number:
Japanese Patent JP5530846
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a metal-carbon composite material capable of considerably improving various characteristics of a DLC film by controlling the inclusion of moisture etc. in a sputtering device when used as a sputtering target.SOLUTION: The metal-carbon composite material is manufactured through a step of kneading and grinding carbon, a binder, and a metal or a metal compound, shaping the ground product to form a molding, and additionally heat-treating the molding at 1,300°C or more.
Inventors:
Yuji Takimoto
Takanori Kono
Rie Tao
Takanori Kono
Rie Tao
Application Number:
JP2010166835A
Publication Date:
June 25, 2014
Filing Date:
July 26, 2010
Export Citation:
Assignee:
Toyo Tanso Co., Ltd.
International Classes:
C04B35/52; B22F1/00; C01B31/02; C22C1/05; C22C1/10; C23C14/34
Domestic Patent References:
| JP9241836A | ||||
| JP2026818A | ||||
| JP2005001972A | ||||
| JP2003277922A |
Attorney, Agent or Firm:
Tetsuo next generation
Masanori Tamura
Masanori Tamura