Title:
ツール性能劣化およびミスマッチの検出のための方法およびシステム
Document Type and Number:
Japanese Patent JP5544413
Kind Code:
B2
Abstract:
Autonomous biologically based learning tool system(s) and method(s) that the tool system(s) employs for learning and analysis of performance degradation and mismatch are provided. The autonomous biologically based learning tool system includes (a) one or more tool systems that perform a set of specific tasks or processes and generate assets and data related to the assets that characterize the various processes and associated tool performance; (b) an interaction manager that receives and formats the data, and (c) an autonomous learning system based on biological principles of learning. Objectively generated knowledge gleaned from synthetic or production data can be utilized to determine a mathematical relationship among a specific output variable and a set of associated influencing variables. The generated relationship facilitates assessment of performance degradation of a set of tools, and performance mismatch among tools therein.
Inventors:
Caux Char, San Jeev
Patel, スケシュ Jay.
Kenji Sugishima
Patel, スケシュ Jay.
Kenji Sugishima
Application Number:
JP2012503438A
Publication Date:
July 09, 2014
Filing Date:
February 03, 2010
Export Citation:
Assignee:
Tokyo Electron, Ltd.
International Classes:
G06N3/00; G06N20/00; H01L21/02
Attorney, Agent or Firm:
Patent business corporation スズエ international patent firm
Shoji Suzue
Masatoshi Kurata
Shigeo Takakura
Kono 哲
Makoto Nakamura
Toshihiro Fukuhara
Peak Takashi
Toshiro Shirane
Sadao Muramatsu
Nobuhisa Nogawa
Yukinaga Yasujiro
Naoki Kono
Sunagawa 克
Iseki Mamoru 3
Tatsushi Sato
Okada Kishi
Mihoko Horiuchi
Masanori Takeuchi
Shoji Suzue
Masatoshi Kurata
Shigeo Takakura
Kono 哲
Makoto Nakamura
Toshihiro Fukuhara
Peak Takashi
Toshiro Shirane
Sadao Muramatsu
Nobuhisa Nogawa
Yukinaga Yasujiro
Naoki Kono
Sunagawa 克
Iseki Mamoru 3
Tatsushi Sato
Okada Kishi
Mihoko Horiuchi
Masanori Takeuchi