Title:
液体噴射ヘッド、液体噴射装置及び圧電素子
Document Type and Number:
Japanese Patent JP5549798
Kind Code:
B2
Abstract:
A liquid ejecting head having pressure chambers each communicating with a nozzle opening for liquid ejection and piezoelectric element having a first electrode, a piezoelectric layer consisting a perovskite oxide containing lead, zirconium, and titanium, and a second electrode. The piezoelectric layer has a carbon intensity ratio in the range of 8 to 28 in its inner region excluding the volume 20 nm in depth from the second electrodes. The carbon intensity ratio is defined as the ratio of the maximum carbon intensity to the minimum as measured by secondary ion mass spectrometry along the thickness of the piezoelectric layer.
Inventors:
Ichiro Asaoka
Jiro Kato
Jiro Kato
Application Number:
JP2009217861A
Publication Date:
July 16, 2014
Filing Date:
September 18, 2009
Export Citation:
Assignee:
Seiko Epson, Inc.
International Classes:
H01L41/318; B41J2/045; B41J2/055; B41J2/135; B41J2/14; B41J2/16; H01L41/09; H01L41/18; H01L41/22; H01L41/39; H01L41/43
Attorney, Agent or Firm:
Hiroyuki Kurihara
Katsutoshi Muranaka
Katsutoshi Muranaka