Title:
リソグラフィ装置
Document Type and Number:
Japanese Patent JP5551515
Kind Code:
B2
Abstract:
Embodiments of a drain in a lithographic projection apparatus are described that have, for example, a feature which reduces inflow of gas into the drain during a period when no liquid is present in the drain. In one example, a passive liquid removal mechanism is provided such that the pressure of gas in the drain is equal to the ambient gas pressure and in another embodiment a flap is provided to close off a chamber during times when no liquid needs removing.
Inventors:
Kemper, ニコラース, Rudolf
Donders, ソヘルド, ニコラース, and Laon Bell -- TASS
オッテンズ, Joest, ジェロエン
Van Dell フーフェン, Jean Cornelis
カダイク, Edwin, Cornelis
Shulepov, Sergei
Donders, ソヘルド, ニコラース, and Laon Bell -- TASS
オッテンズ, Joest, ジェロエン
Van Dell フーフェン, Jean Cornelis
カダイク, Edwin, Cornelis
Shulepov, Sergei
Application Number:
JP2010118223A
Publication Date:
July 16, 2014
Filing Date:
May 24, 2010
Export Citation:
Assignee:
ASML Nether ランズ B. buoy.
International Classes:
H01L21/027; G03F7/20
Attorney, Agent or Firm:
Yoshiyuki Inaba
Toshifumi Onuki
Toshifumi Onuki
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