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Title:
真空環境試験装置
Document Type and Number:
Japanese Patent JP5583437
Kind Code:
B2
Abstract:

To provide a vacuum environmental testing apparatus which reduces the consumption amount of liquid nitrogen in a vacuum apparatus equipped with a contamination panel.

The vacuum environmental testing apparatus equipped with the contamination panel in an vacuum vessel containing a sample includes: means for supplying liquid nitrogen, means for separating the supplied nitrogen into a gas phase and a liquid phase, means for supplying nitrogen in the separated phases to contamination panels independent from each other; and means for releasing high temperature nitrogen gas vaporized with the rise of temperature in the contamination panel into atmosphere.

COPYRIGHT: (C)2011,JPO&INPIT


Inventors:
Hironobu Ueda
Yoshida Pure
Application Number:
JP2010059670A
Publication Date:
September 03, 2014
Filing Date:
March 16, 2010
Export Citation:
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Assignee:
Hitachi, Ltd.
International Classes:
B64G7/00; G01N17/00
Attorney, Agent or Firm:
Polaire Intellectual Property Corporation



 
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