Title:
電子部品用リーク検査装置および電子部品のリーク検査方法
Document Type and Number:
Japanese Patent JP5585962
Kind Code:
B2
Inventors:
Kazuhisa Momose
Application Number:
JP2011172565A
Publication Date:
September 10, 2014
Filing Date:
August 08, 2011
Export Citation:
Assignee:
アキム, Inc.
International Classes:
G01M3/04; G01P21/00; H01L29/84
Attorney, Agent or Firm:
Sawara Masafumi
Yokota Kazuki
Yokota Kazuki