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Title:
マスクブランクおよび転写用マスク
Document Type and Number:
Japanese Patent JP5602930
Kind Code:
B2
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JP2004053955METHOD FOR FORMING THIN FILM ON MASK FOR PRESCRIBING MAGNETIZATION PATTERN SHAPE AND MASK FOR PRESCRIBING MAGNETIZATION PATTERN SHAPE, AS WELL AS METHOD FOR REMOVING SURPLUS THIN FILM OF THE MASK
JPS6147964NOVEL PHOTOMASK BLANK AND PHOTOMASK
JPH021851MASK BLANK FOR ELECTRON RAY EXPOSING
Inventors:
Masahiro Hashimoto
Hiroyuki Iwashita
Okubo 靖
Jun Nozawa
Application Number:
JP2013232918A
Publication Date:
October 08, 2014
Filing Date:
November 11, 2013
Export Citation:
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Assignee:
Hoya Corp.
International Classes:
G03F1/50; G03F1/46; G03F1/54; G03F1/58; H01L21/027
Attorney, Agent or Firm:
Toson Yasuo



 
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