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Title:
シリコーン樹脂を含んだ感光性樹脂組成物、及びこれを用いた硬化物
Document Type and Number:
Japanese Patent JP5603170
Kind Code:
B2
Abstract:

To provide a photosensitive resin composition excellent in weather resistance, light resistance and heat resistance and allowing formation of a micropattern.

The photosensitive resin composition contains, as essential components: (i) an alkali-soluble resin expressed by general formula (1), having a carboxylic acid residue and a polymerizable unsaturated group in each molecule; (ii) a photopolymerizable monomer having at least one ethylenically unsaturated bond; and (iii) a photopolymerization initiator. In formula (1), X represents a bivalent substituent group that may contain a heteroatom inside; Y represents a substituent wherein a group containing a polymerizable double bond and a carboxyl group is bonded to an isocyanuric ring skeleton; and Z represents a hydrogen atom or a substituent group wherein a group containing a polymerizable double bond and a carboxyl group is bonded to an isocyanuric ring skeleton.

COPYRIGHT: (C)2011,JPO&INPIT


Inventors:
Namegawa 崇平
Masaomi Takano
Shuichiro Nagatani
Aoyama 健
Application Number:
JP2010189358A
Publication Date:
October 08, 2014
Filing Date:
August 26, 2010
Export Citation:
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Assignee:
Nippon Steel 住金 chemicals incorporated company
International Classes:
G03F7/075; C08F290/06; C08G77/388; H01L21/027
Attorney, Agent or Firm:
Kazuya Sasaki
Katsuo Naruse
Tomohiro Nakamura
Sano Eiichi