Title:
セラミック内に埋込電極を備えるアドレス指定可能なマイクロプラズマデバイスおよびアレイ
Document Type and Number:
Japanese Patent JP5616019
Kind Code:
B2
Abstract:
An array of microcavity plasma devices is formed in a ceramic substrate that provides structure for and isolation of an array of microcavities that are defined in the ceramic substrate. The ceramic substrate isolates the microcavities from electrodes disposed within the ceramic substrate. The electrodes are disposed to ignite a discharge in microcavities in the array of microcavities upon application of a time-varying potential between the electrodes. Embodiments of the invention include electrode and microcavity arrangements that permit addressing of individual microcavities or groups of microcavities. The contour of the microcavity wall allows for the electric field within the microcavity to be shaped.
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Inventors:
エデン，ゲリー ジェイ
パーク，サン−ジン
パーク，サン−ジン
Application Number:
JP2008551475A
Publication Date:
October 29, 2014
Filing Date:
January 22, 2007
Export Citation:
Assignee:
ザ ボード オブ トラスティーズ オブ ザ ユニバーシティ オブ イリノイ
International Classes:
H01J11/32; H01J11/12; H01J17/16; H01J17/49; H01J65/00
Attorney, Agent or Firm:
Mitsuru Kimura
Takanori Menju
Taiji Morikawa
Yasuhito Amemiya
Kei Sakurada
Field Yasuyuki
Takanori Menju
Taiji Morikawa
Yasuhito Amemiya
Kei Sakurada
Field Yasuyuki