Title:
ターボ分子ポンプのボルト締結構造およびターボ分子ポンプ
Document Type and Number:
Japanese Patent JP5626445
Kind Code:
B2
Abstract:
A bolt fastening system for a turbomolecular pump wherein a first member is fastened in an axial direction with respect to a second member by multiple bolts arranged concentrically with respect to a rotor shaft center. The bolt-fastening system equipped with multiple pairs of non-penetrating pinholes arranged concentrically with respect to a rotor shaft center and formed opposing one another in respective opposing faces of the fastened first and second members, and equipped with pins provided for each pair of pinholes and inserted into the pairs of pinholes. When the size of a gap between a bolt and a bolt hole formed in the first member is Db, and a sizes of the gaps between the pins and the pinholes formed in the first and second members are Dp1 and Dp2, the gap sizes Db, Dp1, and Dp2 satisfy the equation Db≧(Dp1+Dp2).
Inventors:
小亀 正人
Application Number:
JP2013500937A
Publication Date:
November 19, 2014
Filing Date:
February 07, 2012
Export Citation:
Assignee:
株式会社島津製作所
International Classes:
F04D19/04
Domestic Patent References:
| JP4609082B2 | 2011-01-12 | |||
| JP2007278163A | 2007-10-25 | |||
| JP2008075489A | 2008-04-03 | |||
| JP4609082B2 | 2011-01-12 | |||
| JP2007278163A | 2007-10-25 | |||
| JP2008075489A | 2008-04-03 |
Attorney, Agent or Firm:
Fuyuki Nagai