Title:
基板搬送装置及び真空処理装置
Document Type and Number:
Japanese Patent JP5632736
Kind Code:
B2
Abstract:
An apparatus includes a chamber configured to form a reduced-pressure space, a carrier which holds a substrate, and a conveyer which conveys the carrier in the chamber. The chamber includes a side wall including an opening portion, and a partition wall arranged in the opening portion, the conveyer includes a permanent magnet provided on the carrier, and a driving magnet arranged outside the partition wall so as to drive the carrier, and the partition wall includes a first portion arranged between the driving magnet and a path through which the carrier passes, and a second portion arranged to connect the first portion to the side wall, the first portion having a smooth surface in a portion in which the first portion faces the path, and the first portion including a plurality of ribs arranged on a surface thereof on a side on which the driving magnet is arranged.
Inventors:
青木 一成
渡邊 和人
渡邊 和人
Application Number:
JP2010291272A
Publication Date:
November 26, 2014
Filing Date:
December 27, 2010
Export Citation:
Assignee:
キヤノンアネルバ株式会社
International Classes:
H01L21/677; B65G49/00
Attorney, Agent or Firm:
Iwata Today sentence
Seto さより
Seto さより