Title:
プローブユニット
Document Type and Number:
Japanese Patent JP5651333
Kind Code:
B2
Inventors:
石川 重樹
藺牟田 正吾
仁平 崇
藺牟田 正吾
仁平 崇
Application Number:
JP2009523602A
Publication Date:
January 14, 2015
Filing Date:
July 07, 2008
Export Citation:
Assignee:
日本発條株式会社
International Classes:
G01R1/073; G01R31/26; H01L21/66
Domestic Patent References:
| JPH09304431A | 1997-11-28 | |||
| JP2002090410A | 2002-03-27 | |||
| JP2006258687A | 2006-09-28 | |||
| JP2005338065A | 2005-12-08 |
Attorney, Agent or Firm:
Hiroaki Sakai