Title:
磁気デバイスおよびその製造方法
Document Type and Number:
Japanese Patent JP5652199
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To shorten the interval of a plurality of tunnel junction elements.SOLUTION: The magnetic device comprises an underlying layer 24 having a recess 26 formed in the upper surface, a lower electrode 28 formed on the inner surface of the recess and on the underlying layer on both sides of the recess, a magnetic tunnel junction layer 30 formed on the lower electrode on both sides of the recess, and including a tunnel barrier layer and a magnetization fixed layer and a magnetization free layer sandwiching the tunnel barrier layer vertically, and a plurality of upper electrodes 40 formed on the magnetic tunnel junction layer and separated electrically above the recess.
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Inventors:
中林 正明
Application Number:
JP2010293813A
Publication Date:
January 14, 2015
Filing Date:
December 28, 2010
Export Citation:
Assignee:
富士通セミコンダクター株式会社
International Classes:
H01L21/8246; H01L27/105; H01L29/82; H01L43/08; H01L43/12
Attorney, Agent or Firm:
Shuhei Katayama