感光性樹脂組成物 - 旭化成イーマテリアルズ株式会社

Title:

感光性樹脂組成物

Document Type and Number:

Japanese Patent JP5657882

Kind Code:

B2

Inventors:

李軍
片岡康浩

Application Number:

JP2009285059A

Publication Date:

January 21, 2015

Filing Date:

December 16, 2009

Export Citation:

Assignee:

旭化成イーマテリアルズ株式会社

International Classes:

G03F7/004; G03F7/038; H01L21/027

Attorney, Agent or Firm:

Aoki 篤
Ishida 敬
Tetsuji Koga
Kazuhiro Nakamura
Hiroyuki Onoda
Saito 都子

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