Title:
高純度バナジウム、高純度バナジウムターゲット及び高純度バナジウムス薄膜
Document Type and Number:
Japanese Patent JP5660701
Kind Code:
B2
Inventors:
新藤 裕一朗
Application Number:
JP2009294263A
Publication Date:
January 28, 2015
Filing Date:
December 25, 2009
Export Citation:
Assignee:
ＪＸ日鉱日石金属株式会社
International Classes:
C22B9/22; C22B34/22; C22C27/02; C22F1/00; C22F1/18; C23C14/34; C25C3/26
Attorney, Agent or Firm:
Isamu Ogoshi