Title:
ガスクラスターイオンビーム装置
Document Type and Number:
Japanese Patent JP5663973
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a gas cluster ion beam device capable of enhancing ionization efficiency while keeping the number of neutral particles composing a gas cluster.SOLUTION: An ionization section where gas cluster ions are generated from a gas cluster is arranged on an extension which connects a nozzle ejecting a gas cluster and a skimmer producing a beam of a gas cluster ejected from the nozzle. The ionization section comprises an electron extraction electrode having a filament generating thermions, and an electron acceleration electrode which accelerates thermions thus extracted. The electron acceleration electrode and the electron extraction electrode are arranged sequentially from the skimmer side.
Inventors:
佐藤 嗣紀
山田 公
山田 公
Application Number:
JP2010139275A
Publication Date:
February 04, 2015
Filing Date:
June 18, 2010
Export Citation:
Assignee:
株式会社不二越
International Classes:
H01J27/20; H01J37/08
Attorney, Agent or Firm:
Kosaku Umemoto
Akiko Okajima
Akiko Okajima