Title:
表面処理剤及び表面処理方法
Document Type and Number:
Japanese Patent JP5680932
Kind Code:
B2
Abstract:
Provided are a surface treatment agent for which hydrophobization to a high degree is possible even in a case of the material of a substrate surface being TiN or SiN, and surface treatment method using such a surface treatment agent. The surface treatment agent according to the present invention contains a cyclic silazane compound. As this cyclic silazane compound, a cyclic disilazane compound such as 2,2,5,5-tetramethyl-2,5-disila-1-azacyclopentane and 2,2,6,6-tetramethyl-2,6-disila-1-azacyclohexane and a cyclic trisilazane compound such as 2,2,4,4,6,6-hexamethylcyclotrisilazane and 2,4,6-trimethyl-2,4,6-trivinylcyclotrisilazane are preferred. In the surface treatment, a substrate surface is exposed to a surface treatment agent according to the present invention, and the substrate surface is hydrophobized.
Inventors:
吉田 正昭
菅原 まい
上野 直久
越山 淳
菅原 まい
上野 直久
越山 淳
Application Number:
JP2010233740A
Publication Date:
March 04, 2015
Filing Date:
October 18, 2010
Export Citation:
Assignee:
東京応化工業株式会社
International Classes:
C09K3/18; B05D7/24; H01L21/027
Attorney, Agent or Firm:
Right wood Masayuki