Title:
移動装置
Document Type and Number:
Japanese Patent JP5693378
Kind Code:
B2
Inventors:
Hirotoshi Nakao
Kenji Eto
Hiroko Kato
Keisuke Shimoda
Seiichi Sato
Kenji Eto
Hiroko Kato
Keisuke Shimoda
Seiichi Sato
Application Number:
JP2011116767A
Publication Date:
April 01, 2015
Filing Date:
May 25, 2011
Export Citation:
Assignee:
ULVAC, Inc.
International Classes:
C23C16/04; H01L21/31
Domestic Patent References:
| JP2006206980A | ||||
| JP2005240121A |
Foreign References:
| WO2007023553A1 | ||||
| WO2005087969A1 |
Attorney, Agent or Firm:
Seiryu Corporation