Title:
有機材料のための蒸発器、及び、蒸発器を用いて基板を有機材料で被覆するための方法
Document Type and Number:
Japanese Patent JP5703224
Kind Code:
B2
Abstract:
An evaporator for vaporizing organic material is described. The evaporator includes a first chamber having a nozzle adapted to be directed to a substrate to be coated; at least one second chamber for vaporizing the organic material; at least one vapour channel for guiding vaporized organic material from the at least one second chamber to the first chamber; wherein the first chamber is adapted to provide vaporized organic material to the nozzle corresponding to a first virtual sublimation surface, and the at least one second chamber being adapted to provide during operation a second sublimation surface area, wherein the second sublimation surface area corresponds to at least 70 percent of the first virtual sublimation surface.
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Inventors:
Hein, Stephan
Hoffmann, Gerd
Hoffmann, Gerd
Application Number:
JP2011528448A
Publication Date:
April 15, 2015
Filing Date:
September 29, 2009
Export Citation:
Assignee:
APPLIED MATERIALS,INCORPORATED
International Classes:
C23C14/24
Domestic Patent References:
| JP63272026A | ||||
| JP2004307877A | ||||
| JP2009097044A | ||||
| JP2009228091A |
Foreign References:
| US6101316 |
Attorney, Agent or Firm:
Sonoda Yoshitaka
Kobayashi Yoshinori
Kobayashi Yoshinori