Title:
基板処理方法および基板処理装置
Document Type and Number:
Japanese Patent JP5715981
Kind Code:
B2
Inventors:
Norihiro Ito
Nakamori Mitsunori
Kono
Yousuke Yatani
Jun Nonaka
Nakamori Mitsunori
Kono
Yousuke Yatani
Jun Nonaka
Application Number:
JP2012074263A
Publication Date:
May 13, 2015
Filing Date:
March 28, 2012
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
H01L21/027; H01L21/304
Domestic Patent References:
| JP2010225789A | ||||
| JP2008246319A | ||||
| JP2001102346A | ||||
| JP2011228438A | ||||
| JP2007067287A | ||||
| JP2005228790A | ||||
| JP2007266497A | ||||
| JP2006261676A |
Attorney, Agent or Firm:
Hirohito Katsunuma
Hiroyuki Nagai
Katsuomi Isogai
Satoshi Nazuka
Junpei Okada
Hideyuki Mori
Yukihiro Hotta
Hiroyuki Nagai
Katsuomi Isogai
Satoshi Nazuka
Junpei Okada
Hideyuki Mori
Yukihiro Hotta