Title:
光半導体装置
Document Type and Number:
Japanese Patent JP5721894
Kind Code:
B2
More Like This:
Inventors:
Hiroshi Koizumi
Yasuhide Okada
Susumu Obata
Middle road
Kazuhito Higuchi
Issei Shimokawa
Yoshiaki Sugisaki
Akihiro Kojima
Yasuhide Okada
Susumu Obata
Middle road
Kazuhito Higuchi
Issei Shimokawa
Yoshiaki Sugisaki
Akihiro Kojima
Application Number:
JP2014195532A
Publication Date:
May 20, 2015
Filing Date:
September 25, 2014
Export Citation:
Assignee:
Toshiba Corporation
International Classes:
H01L33/54; H01L33/50; H01L33/62
Domestic Patent References:
JP2007517404A | ||||
JP20037929A | ||||
JP2010517273A |
Foreign References:
WO2009069671A1 |
Attorney, Agent or Firm:
Masahiko Hinataji