Title:
検出器と回路の飽和を避けることにより検査システムの熱破損を削減して、検出範囲を拡張するためのシステム、回路、方法
Document Type and Number:
Japanese Patent JP5722824
Kind Code:
B2
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Inventors:
Wolters, christian h
Romanovsky, Anatoly
Slovodov, Alexander
Romanovsky, Anatoly
Slovodov, Alexander
Application Number:
JP2012093665A
Publication Date:
May 27, 2015
Filing Date:
April 17, 2012
Export Citation:
Assignee:
KLA-Tenker Corporation
International Classes:
G01N21/956; G01N21/88
Domestic Patent References:
| JP64044557U | ||||
| JP2134510A | ||||
| JP2005526239A | ||||
| JP9061537A | ||||
| JP2001022937A | ||||
| JP6249791A | ||||
| JP11329340A | ||||
| JP6273344A | ||||
| JP2002501185A | ||||
| JP2005276488A | ||||
| JP2005524827A | ||||
| JP2002181725A |
Foreign References:
| US20040016867 |
Attorney, Agent or Firm:
Masaki Yamakawa
Shigeki Yamakawa
Shigeki Yamakawa