Title:
板状部材の支持装置
Document Type and Number:
Japanese Patent JP5723612
Kind Code:
B2
Inventors:
Nakata Miki
Application Number:
JP2011015988A
Publication Date:
May 27, 2015
Filing Date:
January 28, 2011
Export Citation:
Assignee:
LINTEC CORPORATION
International Classes:
H01L21/683
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Attorney, Agent or Firm:
Yoshio Yamaguchi