Title:
感光性樹脂組成物
Document Type and Number:
Japanese Patent JP5732222
Kind Code:
B2
Inventors:
Ushiyama Kosuke
Hideyuki Ito
Hideyuki Ito
Application Number:
JP2010221374A
Publication Date:
June 10, 2015
Filing Date:
September 30, 2010
Export Citation:
Assignee:
Taiyo Holdings Co., Ltd.
International Classes:
G03F7/031; G03F7/004; G03F7/095; H01J9/02
Domestic Patent References:
| JP2007073434A | ||||
| JP2007248516A | ||||
| JP2010189279A | ||||
| JP2009042732A | ||||
| JP2010189280A |
Attorney, Agent or Firm:
Amagi International Patent Office