Title:
基板処理装置
Document Type and Number:
Japanese Patent JP5734705
Kind Code:
B2
Inventors:
FUJIWARA NAOKI
Tanizawa Shigenori
Atsushi Notsuki
Seiichiro Sano
Sawashima Hayabusa
Hidekazu Ishikawa
Fujiwara Tomonori
Tanizawa Shigenori
Atsushi Notsuki
Seiichiro Sano
Sawashima Hayabusa
Hidekazu Ishikawa
Fujiwara Tomonori
Application Number:
JP2011045219A
Publication Date:
June 17, 2015
Filing Date:
March 02, 2011
Export Citation:
Assignee:
Screen Holdings Co., Ltd.
International Classes:
H01L21/304; B08B3/02
Domestic Patent References:
| JP2003168668A | ||||
| JP2004356517A | ||||
| JP10275846A | ||||
| JP2007168039A | ||||
| JP7034982U | ||||
| JP2006026609A | ||||
| JP2001053046A | ||||
| JP7254583A | ||||
| JP2004267870A | ||||
| JP2009212335A |
Foreign References:
| WO2007132609A1 |
Attorney, Agent or Firm:
Inaoka cultivation
Mio Kawasaki
Masahide Yasuda
Mio Kawasaki
Masahide Yasuda
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