Title:
レジスト組成物、レジストパターン形成方法
Document Type and Number:
Japanese Patent JP5743622
Kind Code:
B2
Inventors:
Yusuke Nakagawa
Yosuke Suzuki
Yasuhiko Kakinoya
Yosuke Suzuki
Yasuhiko Kakinoya
Application Number:
JP2011058291A
Publication Date:
July 01, 2015
Filing Date:
March 16, 2011
Export Citation:
Assignee:
Tokyo Ohka Kogyo Co., Ltd.
International Classes:
G03F7/004; G03F7/039; H01L21/027
Domestic Patent References:
| JP2009276404A | ||||
| JP9022117A | ||||
| JP2003207886A | ||||
| JP2004117688A |
Attorney, Agent or Firm:
Sumio Tanai
Masatake Shiga
Suzuki Mitsuyoshi
Mitsunaga Igarashi
Masatake Shiga
Suzuki Mitsuyoshi
Mitsunaga Igarashi