Title:
スパッタリングターゲット及びその製造方法並びに該ターゲットを用いた薄膜、該薄膜を備える薄膜シート、積層シート
Document Type and Number:
Japanese Patent JP5747738
Kind Code:
B2
Inventors:
Hideaki Sakurai
Kumiko Arizumi
Kumiko Arizumi
Application Number:
JP2011186043A
Publication Date:
July 15, 2015
Filing Date:
August 29, 2011
Export Citation:
Assignee:
Mitsubishi Materials Corporation
International Classes:
C23C14/34; B32B9/00; C04B35/453; C23C14/08
Domestic Patent References:
| JP2010160917A | ||||
| JP2009263709A | ||||
| JP2004176135A | ||||
| JP11322413A | ||||
| JP2010275618A | ||||
| JP2000174296A |
Foreign References:
| WO2006129410A1 |
Attorney, Agent or Firm:
Masayoshi Suda
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