Title:
新規な吸光剤及びこれを含む有機反射防止膜形成用組成物
Document Type and Number:
Japanese Patent JP5753236
Kind Code:
B2
Inventors:
Jejun Hoon
Eunkyo
Ijin Han
Han Eun Hee
Kim Sam Min
Eunkyo
Ijin Han
Han Eun Hee
Kim Sam Min
Application Number:
JP2013183179A
Publication Date:
July 22, 2015
Filing Date:
September 04, 2013
Export Citation:
Assignee:
Korea Kumho Petrochemical Co.,Ltd.
International Classes:
C09K3/00; C07C69/353; C07C69/74; C07C69/757; G03F7/004; G03F7/11; H01L21/027
Domestic Patent References:
| JP2009258574A | ||||
| JP2010055049A |
Attorney, Agent or Firm:
Kazuko Fujita