Title:
導電性薄膜
Document Type and Number:
Japanese Patent JP5764171
Kind Code:
B2
Inventors:
Masao Mizuno
Application Number:
JP2013164264A
Publication Date:
August 12, 2015
Filing Date:
August 07, 2013
Export Citation:
Assignee:
KABUSHIKI KAISHA KOBE SEIKO SHO
International Classes:
C23C14/06; H01B5/14
Domestic Patent References:
| JP6322517A | ||||
| JP2002373823A | ||||
| JP9067668A | ||||
| JP2000199054A | ||||
| JP7180038A | ||||
| JP2007532783A | ||||
| JP60194070A | ||||
| JP2000129462A |
Foreign References:
| US5648174 | ||||
| WO2005100635A1 |
Other References:
Caldwell, M.L., et al.,"Optical properties of manganese doped amorphous and crystalline aluminum nitride films",Mat. Res. Soc. Symp.,2000年,Vol. 595,W3.26.1 - W3.26.6
Tucceri, R.C., et al.,"SIMS and CL characterization of manganese-doped aluminum nitride films",Mat. Res. Soc. Symp.,1999年,Vol. 572,pp. 413-418
Tucceri, R.C., et al.,"SIMS and CL characterization of manganese-doped aluminum nitride films",Mat. Res. Soc. Symp.,1999年,Vol. 572,pp. 413-418
Attorney, Agent or Firm:
Isono Dozo