Title:
静電容量素子
Document Type and Number:
Japanese Patent JP5766011
Kind Code:
B2
Inventors:
Hiroshi Katsuta
Hideharu Kurioka
Hideharu Kurioka
Application Number:
JP2011103490A
Publication Date:
August 19, 2015
Filing Date:
May 06, 2011
Export Citation:
Assignee:
Kyocera Corporation
International Classes:
H01L21/822; H01G4/12; H01G4/33; H01L27/04
Domestic Patent References:
| JP9321227A | ||||
| JP54098958A | ||||
| JP11511906A | ||||
| JP2006500785A |
Foreign References:
| WO1998043298A1 |