Title:
少なくとも２つの鏡面を有するミラーを製造する方法、マイクロリソグラフィ用投影露光装置のミラー、及び投影露光装置
Document Type and Number:
Japanese Patent JP5767221
Kind Code:
B2
Inventors:
Jochen Hetzler
Ralph Mueller
Wolfgang Singer
Ralph Mueller
Wolfgang Singer
Application Number:
JP2012523302A
Publication Date:
August 19, 2015
Filing Date:
July 30, 2010
Export Citation:
Assignee:
Carl Zeiss SGM Gaehha
International Classes:
G03F7/20; G02B5/10
Domestic Patent References:
| JP63111500A | ||||
| JP7235476A | ||||
| JP8152507A | ||||
| JP2002311198A | ||||
| JP2002522898A | ||||
| JP2004289127A | ||||
| JP2005231994A | ||||
| JP2006506772A | ||||
| JP2008514971A | ||||
| JP2008520084A | ||||
| JP2008529094A | ||||
| JP2009010174A |
Attorney, Agent or Firm:
Kenji Sugimura
Tsubouchi Shin
Tsubouchi Shin
Previous Patent: １つ又はそれ以上の脂肪族ジアミンを還元的アミノ化反応溶媒及び不純物...
Next Patent: METHOD OF PRODUCING MUTICORE NB3SN SUPERCONDUCTOR
Next Patent: METHOD OF PRODUCING MUTICORE NB3SN SUPERCONDUCTOR