Title:
物理量の局所分解測定のための方法および装置
Document Type and Number:
Japanese Patent JP5767513
Kind Code:
B2
Abstract:
The method involves generating an electrical signal (6) with a time-varying frequency and generating another electrical signal (7) with another time-varying frequency, which differs from the former frequency by a difference frequency. A third electrical signal (8) is generated with a third frequency, where the third frequency corresponds to the difference frequency or a multiple of the difference frequency. An independent claim is also included for a device for spatially resolved measurement of a physical dimension.
Inventors:
Hill, vieland
Fromme, Martin
Cubler, jochen
Loader, ingo
Fromme, Martin
Cubler, jochen
Loader, ingo
Application Number:
JP2011135814A
Publication Date:
August 19, 2015
Filing Date:
June 17, 2011
Export Citation:
Assignee:
LIOS Technology GmbH
International Classes:
G01K11/12; G02B6/00
Domestic Patent References:
| JP2001227911A | ||||
| JP11023215A | ||||
| JP2010091294A |
Foreign References:
| WO2001020288A1 |
Attorney, Agent or Firm:
Keiichiro Saikyo