Title:
基板の製造方法
Document Type and Number:
Japanese Patent JP5769681
Kind Code:
B2
Inventors:
Satoshi Kawamura
Tomohiro Hayakawa
Tomohiro Hayakawa
Application Number:
JP2012208297A
Publication Date:
August 26, 2015
Filing Date:
September 21, 2012
Export Citation:
Assignee:
Kyocera Corporation
International Classes:
B24B27/06; B28D5/04; H01L21/304
Domestic Patent References:
| JP2005186222A | ||||
| JP10086141A | ||||
| JP10175153A | ||||
| JP9066522A | ||||
| JP63169260A | ||||
| JP2010105061A |
Foreign References:
| US20060107940 |
Attorney, Agent or Firm:
Yoshitake Hidetoshi
Takahiro Arita
Takahiro Arita