Title:
基板処理方法および基板処理装置
Document Type and Number:
Japanese Patent JP5771035
Kind Code:
B2
Inventors:
Masahiro Motomura
Okutani Manabu
Masayuki Otsuji
Okutani Manabu
Masayuki Otsuji
Application Number:
JP2011071590A
Publication Date:
August 26, 2015
Filing Date:
March 29, 2011
Export Citation:
Assignee:
Screen Holdings Co., Ltd.
International Classes:
H01L21/304
Domestic Patent References:
| JP2010114414A | ||||
| JP2011009537A | ||||
| JP2008205490A | ||||
| JP2004078217A |
Foreign References:
| WO2010047196A1 | ||||
| US20100122711 |
Attorney, Agent or Firm:
Inaoka cultivation
Mio Kawasaki
Masahide Yasuda
Mio Kawasaki
Masahide Yasuda