Title:
荷電粒子ビーム描画装置及び荷電粒子ビーム描画方法
Document Type and Number:
Japanese Patent JP5773637
Kind Code:
B2
Inventors:
Hiroshi Matsumoto
Application Number:
JP2010282889A
Publication Date:
September 02, 2015
Filing Date:
December 20, 2010
Export Citation:
Assignee:
New Flare Technology Co., Ltd.
International Classes:
H01L21/027; G03F7/20
Domestic Patent References:
| JP9237745A | ||||
| JP2011022617A |
Attorney, Agent or Firm:
Tetsuma Ikegami
Akira Sudo
Mitsuyuki Matsuyama
Akira Sudo
Mitsuyuki Matsuyama