Title:
基板処理装置
Document Type and Number:
Japanese Patent JP5783756
Kind Code:
B2
Inventors:
Toshihito Morioka
Application Number:
JP2011041570A
Publication Date:
September 24, 2015
Filing Date:
February 28, 2011
Export Citation:
Assignee:
Screen Holdings Co., Ltd.
International Classes:
H01L21/304
Domestic Patent References:
| JP2138427U |
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