Title:
レジストパターン形成方法
Document Type and Number:
Japanese Patent JP5783861
Kind Code:
B2
Inventors:
Yokotani Jiro
Takeshi Nakamura
Hiroaki Shimizu
Hitoshi Nito
Takeshi Nakamura
Hiroaki Shimizu
Hitoshi Nito
Application Number:
JP2011202030A
Publication Date:
September 24, 2015
Filing Date:
September 15, 2011
Export Citation:
Assignee:
Tokyo Ohka Kogyo Co., Ltd.
International Classes:
G03F7/038; G03F7/004; G03F7/039
Domestic Patent References:
| JP7261393A | ||||
| JP2012181510A | ||||
| JP2011102974A | ||||
| JP2001133980A |
Foreign References:
| US6395451 | ||||
| US20020160316 |
Attorney, Agent or Firm:
Sumio Tanai
Masatake Shiga
Suzuki Mitsuyoshi
Mitsunaga Igarashi
Masatake Shiga
Suzuki Mitsuyoshi
Mitsunaga Igarashi
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