Title:
多層反射防止膜の製造方法
Document Type and Number:
Japanese Patent JP5804788
Kind Code:
B2
Inventors:
Eiichi Takahashi
Tokuo Nakayama
Toshihiko Takagi
Yukiko Enomoto
Haruhiko Fukumoto
Tokuo Nakayama
Toshihiko Takagi
Yukiko Enomoto
Haruhiko Fukumoto
Application Number:
JP2011131547A
Publication Date:
November 04, 2015
Filing Date:
June 13, 2011
Export Citation:
Assignee:
Mitsui Chemicals, Inc.
International Classes:
G02B1/11; G02B1/111; G02B1/115
Domestic Patent References:
| JP2009525498A | ||||
| JP2010038948A | ||||
| JP5053002A | ||||
| JP7104102A | ||||
| JP11072602A | ||||
| JP2010250069A | ||||
| JP4113323A | ||||
| JP2011003585A |
Foreign References:
| WO2010103856A1 |
Attorney, Agent or Firm:
Shinji Hayami