Title:
被加工物の切断方法
Document Type and Number:
Japanese Patent JP5806082
Kind Code:
B2
Inventors:
Satoshi Kawamura
Tomohiro Hayakawa
Tomohiro Hayakawa
Application Number:
JP2011238694A
Publication Date:
November 10, 2015
Filing Date:
October 31, 2011
Export Citation:
Assignee:
Kyocera Corporation
International Classes:
B24B27/06; B28D5/04; H01L21/304
Domestic Patent References:
| JP2004306250A | ||||
| JP2011194560A |