Title:
基板搬送ロボット
Document Type and Number:
Japanese Patent JP5806826
Kind Code:
B2
Inventors:
Mitsunori Hayashi
Satoshi Abe
Satoshi Abe
Application Number:
JP2011059716A
Publication Date:
November 10, 2015
Filing Date:
March 17, 2011
Export Citation:
Assignee:
ULVAC, Inc.
International Classes:
B25J19/00; B25J9/06; H01L21/677
Domestic Patent References:
| JP2000511119A | ||||
| JP2003266344A | ||||
| JP241887A | ||||
| JP5193741A |
Attorney, Agent or Firm:
Seiryu Corporation