Title:
複合ターゲット
Document Type and Number:
Japanese Patent JP5808066
Kind Code:
B2
Abstract:
A sputtering target that includes at least two consolidated blocks, each block including an alloy including molybdenum in an amount greater than about 30 percent by weight and at least one additional alloying ingredient; and a joint between the at least two consolidated blocks, the joint being free of any microstructure due to an added bonding agent (e.g., powder, foil or otherwise), and being essentially free of any visible joint line the target that is greater than about 200 μm width (e.g., less than about 50 μm width). A process for making the target includes hot isostatically pressing, below a temperature of 1080° C., consolidated perform blocks that may be surface prepared (e.g., roughened to a predetermined roughness value) prior to pressing.
Inventors:
Rosac, Gary, Alan
Gaidos, Mark, Yi.
Gaidos, Mark, Yi.
Application Number:
JP2014510430A
Publication Date:
November 10, 2015
Filing Date:
May 09, 2012
Export Citation:
Assignee:
H. C. Stark Ink.
International Classes:
C23C14/34; B22F1/00; B22F3/15; C22C1/04; C22C14/00; C22C27/04; C23C14/14
Domestic Patent References:
| JP2007297654A | ||||
| JP2003226966A |
Attorney, Agent or Firm:
Kazuhiro Kiyohara