Title:
エバポレータ
Document Type and Number:
Japanese Patent JP5815616
Kind Code:
B2
Abstract:
A containment vessel for evaporating materials for use in applying film coatings to a substrate includes a body fabricated from a refractory material. In one embodiment the body includes end portions capable of being connected to other bodies in an end to end fashion. In another embodiment, the body includes an integral patterned conductor incorporated into the outer surface portion of the body to facilitate association with an electrical power source for heating.
Inventors:
Mariner, John
Longworth, Douglas, A.
Paltz, Donald, William, Jr.
Liao, Feng
Lucinco, David, M.
Lou, Zhong-Hao
Hale, Timothy, Jay.
Longworth, Douglas, A.
Paltz, Donald, William, Jr.
Liao, Feng
Lucinco, David, M.
Lou, Zhong-Hao
Hale, Timothy, Jay.
Application Number:
JP2013169472A
Publication Date:
November 17, 2015
Filing Date:
August 19, 2013
Export Citation:
Assignee:
Momentive Performance Materials Inc.
International Classes:
C23C14/24
Domestic Patent References:
| JP2008001587A | ||||
| JP2004027252A | ||||
| JP11504613A | ||||
| JP2000012218A | ||||
| JP5503317A | ||||
| JP2003077662A | ||||
| JP2004232090A | ||||
| JP2007327125A | ||||
| JP2003034591A |
Attorney, Agent or Firm:
Satoshi Furuya
Takahiko Mizobe
Kiyoharu Nishiyama
Takahiko Mizobe
Kiyoharu Nishiyama
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