Title:
レジスト組成物及びレジストパターンの製造方法
Document Type and Number:
Japanese Patent JP5829942
Kind Code:
B2
Inventors:
Koji Ichikawa
Akira Kamabuchi
Gold pillar
Akira Kamabuchi
Gold pillar
Application Number:
JP2012033545A
Publication Date:
December 09, 2015
Filing Date:
February 20, 2012
Export Citation:
Assignee:
Sumitomo Chemical Co., Ltd.
International Classes:
G03F7/039; G03F7/004
Domestic Patent References:
JP2003280202A | ||||
JP2011095623A | ||||
JP8202038A | ||||
JP2012185472A | ||||
JP2011128226A | ||||
JP2012118518A | ||||
JP2012177801A |
Foreign References:
WO2011072307A1 | ||||
WO2011034176A1 | ||||
WO2010001913A1 |
Attorney, Agent or Firm:
Shinki Global IP Patent Corporation