Title:
焦電型検出器、焦電型検出装置及び電子機器
Document Type and Number:
Japanese Patent JP5830877
Kind Code:
B2
Abstract:
A pyroelectric detector includes a substrate, a support member, a spacer member, and a pyroelectric detecting element. The spacer member supports the support member over the substrate with a cavity part being formed therebetween. The pyroelectric detecting element includes a first electrode mounted on the support member, a second electrode, and a pyroelectric body between the first and second electrodes. The first electrode includes a first region on which the pyroelectric body is layered, and a second region protruding from the first region in plan view. The support member includes an insulating layer, a first wiring layer disposed on the second surface side of the insulating layer, and a first plug passing through the insulating layer at a position where the first wiring layer and the second region of the first electrode overlap in plan view to connect the first wiring layer with the first electrode.
Inventors:
Takashi Noda
Application Number:
JP2011037959A
Publication Date:
December 09, 2015
Filing Date:
February 24, 2011
Export Citation:
Assignee:
Seiko Epson Corporation
International Classes:
G01J1/02
Domestic Patent References:
| JP2008232896A | ||||
| JP2001255203A | ||||
| JP2010287771A | ||||
| JP1094227A | ||||
| JP2010249676A | ||||
| JP9196765A | ||||
| JP62075219A |
Attorney, Agent or Firm:
Kazuaki Watanabe
Keisuke Nishida
Satoshi Nakai
Keisuke Nishida
Satoshi Nakai