Title:
シリコンウエハ用研磨液組成物
Document Type and Number:
Japanese Patent JP5833435
Kind Code:
B2
Inventors:
Suzuki Masahiko
Application Number:
JP2011289264A
Publication Date:
December 16, 2015
Filing Date:
December 28, 2011
Export Citation:
Assignee:
Kao Corporation
International Classes:
H01L21/304; B24B37/00; C09K3/14
Domestic Patent References:
| JP2011171689A | ||||
| JP4092021B2 | ||||
| JP2000109818A | ||||
| JP2006203188A |
Attorney, Agent or Firm:
Ikeuchi, Sato & Partners