Title:
光学顕微鏡、及び分光測定方法
Document Type and Number:
Japanese Patent JP5838466
Kind Code:
B2
Abstract:
An optical microscope capable of performing measurement with a high resolution and a spectrometry method are provided. A spectrometry device according to an aspect of the present invention includes a laser light source 10, an objective lens 21 that concentrates a light beam and applies the concentrated light beam onto a sample 22, a Y-scanning unit 13 that scans a spot position of the light beam on the sample 22, a beam splitter 17 that separates, among the light beam incident on the sample 22, outgoing light emitted from the sample 22 toward the objective lens 21 side from the light beam emitted from the light source 10 and incident on the sample, the outgoing light being emitted with a different wavelength, a spectroscope 31 that spatially disperses the outgoing light separated by the beam splitter 17 according to the wavelength, a detector 32 that detects the outgoing light dispersed by the spectroscope 31, and a pinhole array 30 disposed on an incoming side of the spectroscope 31, a plurality of pinholes 42 being arranged in the pinhole array, the plurality of pinholes 42 being adapted to allow outgoing light to pass therethrough to the spectroscope 31 side.
Inventors:
Satoshi Kawata
Minoru Kobayashi
Taisuke Ota
Minoru Kobayashi
Taisuke Ota
Application Number:
JP2011054538A
Publication Date:
January 06, 2016
Filing Date:
March 11, 2011
Export Citation:
Assignee:
Nano Photon Co., Ltd.
International Classes:
G02B21/00; G01N21/64; G01N21/65
Domestic Patent References:
| JP2004199063A | ||||
| JP2010262176A | ||||
| JP2010538326A | ||||
| JP2010054368A | ||||
| JP2007179002A | ||||
| JP2002523731A |
Attorney, Agent or Firm:
Ken Ieiri
Yasuhiro Iwase
Yasuhiro Iwase