Title:
液体噴射ヘッド、液体噴射装置、圧電素子、超音波センサー及び赤外センサー
Document Type and Number:
Japanese Patent JP5839157
Kind Code:
B2
Abstract:
A liquid ejection head includes a piezoelectric element (300) having a piezoelectric layer (70) and electrodes (80) provided on the piezoelectric layer. The piezoelectric layer is 3 µm or less in thickness. The piezoelectric layer is made of a piezoelectric material containing a perovskite compound including bismuth manganate ferrate and barium titanate. The piezoelectric layer is preferentially oriented with the (110) plane, the position (20) of the X-ray diffraction peak attributed to the (110) plane being 31.80º or more and 32.00° or less.
Inventors:
▲濱▼田 泰彰
Application Number:
JP2011015924A
Publication Date:
January 06, 2016
Filing Date:
January 28, 2011
Export Citation:
Assignee:
Seiko Epson Corporation
International Classes:
H01L41/187; B41J2/045; B41J2/055; B41J2/135; B41J2/14; H01L21/314; H01L21/316; H01L21/8246; H01L27/105; H01L41/08; H01L41/09; H01L41/18; H01L41/22; H01L41/318; H01L41/39
Domestic Patent References:
| JP2007287745A | ||||
| JP2010018452A | ||||
| JP2010254560A | ||||
| JP2010043353A | ||||
| JP10167814A | ||||
| JP2007145644A | ||||
| JP8017245A |
Other References:
S.O.LEONTSEV(他1名),Dielectric and Piezoelectric Properties in Mn-Modified (1-x)BiFeO3-xBaTiO3 Ceramics,Journal of the American Ceramic Society,米国,The American Ceramic Society,2009年 9月22日,Vol 92, Issue 12,p.2957-2961
Attorney, Agent or Firm:
Hiroyuki Kurihara
Mountain Saki Yuichiro
Mountain Saki Yuichiro