Title:
レジスト残渣除去組成物
Document Type and Number:
Japanese Patent JP5839226
Kind Code:
B2
Inventors:
Yousuke Oi
Mizuki Takei
Yoshitaka Nishijima
Mizuki Takei
Yoshitaka Nishijima
Application Number:
JP2011244762A
Publication Date:
January 06, 2016
Filing Date:
November 08, 2011
Export Citation:
Assignee:
Nagase Chemtex Co., Ltd.
International Classes:
G03F7/42; H01L21/304
Domestic Patent References:
| JP2004310052A | ||||
| JP2004307813A | ||||
| JP2003503556A | ||||
| JP2007016232A | ||||
| JP2008107494A | ||||
| JP2006049881A | ||||
| JP2000507304A | ||||
| JP2007086689A | ||||
| JP2011204909A | ||||
| JP2005317636A |
Foreign References:
| WO2008023753A1 | ||||
| US20010051440 |
Attorney, Agent or Firm:
Shinya Furuya